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Automated visual inspection in the semiconductor industry: A survey - ScienceDirect
Source: sciencedirect.com
Article summary:
1. This paper reviews various optical inspection approaches in the semiconductor industry and categorizes the previous literatures by the inspection algorithm and inspected products.
2. Automated visual inspection systems are widely installed in the design, layout, fabrication, assembly, and testing processes of production lines to improve yield rate and reduce manufacturing costs.
3. This paper reviews multiple defect types of various inspected products which can be referenced for further implementations and improvements.
Article analysis:
The article “Automated Visual Inspection in the Semiconductor Industry: A Survey” is a comprehensive review of automated visual inspection (AVI) techniques used in the semiconductor industry between 2000 and 2013. The article is well-written and provides an overview of AVI systems used in semiconductor industry, as well as a review of related literature using two parallel methodologies – algorithms classification into four major categories (projection methods, filter-based approaches, learning-based approaches, and hybrid methods) and inspected products classification into three categories (wafers, TFT-LCDs, LEDs).
The article is generally reliable and trustworthy; however there are some potential biases that should be noted. Firstly, the article does not provide any counterarguments or alternative perspectives on AVI techniques discussed in it; instead it focuses solely on positive aspects of these techniques without exploring any possible risks or drawbacks associated with them. Secondly, while discussing different algorithms used for AVI systems development the article does not provide any evidence to support its claims about their effectiveness; instead it relies solely on theoretical assumptions without providing any practical examples or case studies to back them up. Finally, while discussing different inspected products the article does not provide any information about their cost or availability which could be important for potential users when deciding which product to use for their needs.
In conclusion, “Automated Visual Inspection in the Semiconductor Industry: A Survey” is a comprehensive review of automated visual inspection techniques used in semiconductor industry between 2000 and 2013 that provides an overview of AVI systems used in this field as well as a review of related literature using two parallel methodologies – algorithms classification into four major categories (projection methods, filter-based approaches, learning-based approaches, and hybrid methods) and inspected products classification into three categories (wafers, TFT-LCDs, LEDs). While generally reliable and trustworthy there are some potential biases that should be noted such as lack of counterarguments or alternative perspectives on