[Full Picture] Higher-mode free-free beam micromechanical resonators | IEEE Conference Publication

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Higher-mode free-free beam micromechanical resonators | IEEE Conference Publication | IEEE Xplore

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Article summary:

1. Polysilicon free-free beam micromechanical resonators based on MEMS technology have been demonstrated at frequencies as high as 102 MHz with Q's on the order of 11,500.

2. Experiments to gauge the effect of variations in support beam dimensions and attachment locations on free-free beam microresonator performance show that an offset of only 0.6 /spl mu/m in the support beam attachment location results in a 7X degradation in the Q.

3. Measured temperature coefficients for second-mode free-free beam /spl mu/resonators are on the order of -13.1 ppm//spl deg/C, which is on par with that for fundamental mode resonance.

Article analysis:

The article is generally reliable and trustworthy, providing detailed information about higher-mode free-free beam micromechanical resonators and their potential applications in transceivers for wireless communications. The article provides evidence for its claims by citing experiments conducted to gauge the effect of variations in support beam dimensions and attachment locations on free-free beam microresonator performance, as well as measurements to evaluate thermal stability of this device. Furthermore, it presents both sides equally by discussing both advantages and limitations associated with these devices.

However, there are some points that could be improved upon such as providing more detail about the experiments conducted and their results, exploring counterarguments more thoroughly, and providing more evidence for its claims (e.g., citing additional studies or research). Additionally, there is no mention of possible risks associated with using these devices or any potential biases that may exist due to partiality or one-sided reporting.

Topics for further research:

Free-free beam microresonator performance Thermal stability of microresonators Advantages and limitations of free-free beam microresonators Experimental results of free-free beam microresonators Risks associated with free-free beam microresonators Biases in reporting on free-free beam microresonators