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微机械|免费全文|TPOS MEMS谐振器单相声子晶体中耦合布拉格和局部共振带隙的Q因子增强
Source: mdpi.com
Article summary:
1. This article proposes a single-phase DIH-PnC structure formed by vertically intersecting double “I” holes.
2. Numerical results show that the DIH-PnC has an ultra-wide band gap and strong attenuation performance, attributed to the coupling of Bragg and local resonance mechanisms.
3. The DIH-PnC was introduced into a TPOS resonator, resulting in a Q factor increase of 20,425.1% compared to conventional resonators and 3762.3% compared to cross-hole PnC resonators.
Article analysis:
This article is generally reliable and trustworthy as it provides detailed information on the proposed single-phase DIH-PnC structure, its numerical results, and its application in TPOS resonators. The authors provide evidence for their claims through numerical simulations and comparisons with existing structures, which adds credibility to their findings. Furthermore, the authors discuss potential risks associated with their proposed structure such as fabrication complexity and cost implications, which demonstrates their awareness of possible limitations of their work.
The only potential bias in this article is that it does not explore counterarguments or alternative solutions to the problem addressed in the paper. However, this does not significantly detract from the overall reliability of the article as it provides sufficient evidence for its claims and conclusions.